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TNO Delft

TNO is an independent research organization and was established by law in1932 as the Netherlands Organization for Applied Natural Science Research. The goal of the organization is to make knowledge applicable to companies and governments.The areas of work can be divided into 6 units: - Energy & Materials Transition - Defense and Security - Healthy Living & Work - High Tech Industry - ICT, Strategy & Policy - Mobility & Built Environment
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SRBA Division:SRBA Controlled Environments (SRBA CE)
Customer Name:TNO Delft
Project Name:Cleanroom according to EBL2 concept
Year built:2017
Category:
  • High Tech

Commissioned by TNO Delft, and in collaboration with engineering partner Deerns, SRBA Controlled Environments (SRBA CE) realized a 265 m² cleanroom in 2017. The HVAC installation was installed by Heijmans in Rotterdam.

In the preliminary stage, we were approached by engineering firm Deerns to help think about the construction of a cleanroom for the EBL2 concept, an Extreme Ultra Violet Exposure and Analysis Facility 2, which was to be placed in a complete cleanroom, built specifically for this purpose, within a year.

In close consultation, we determined the implementation details in collaboration with Deerns. The big question within TNO was, ‘where to realize this cleanroom?’ An extensive research, within which many variants were studied, was necessary to finally determine together that the basement space was the most privileged space to build this prestigious project.

For this clean room, we applied our walkable ceiling system BPM100, with the special detail of partially diffuse light-permeable glass panels. In order to ensure that the project would run smoothly and be completed within a short period of time, an intensive planning session was held with our partner Heijmans in which many details were discussed in advance. We can jointly speak of a successful project!

With our PP4CE partner Bolidt, we provided the existing floor with a special new top coat. PP4CE partner WERO took care of the classification cleaning. The good cooperation between all involved, led to a correct delivery date and a satisfied customer!

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